Substrate processing brush and substrate processing apparatus comprising the same

A substrate processing brush comprising:

• a holder;
• a substrate processing pad detachably disposed in the holder, processing the substrate;
• a substrate processing sweeper connected to the holder, processing the substrate together with the substrate processing pad;
• and
• a pressing member disposed inside the holder to bring the substrate processing pad into close contact with the holder;
• and
• a shaft connection member disposed inside the holder between an upper surface of the holder and the pressing member and connected to a brush rotation shaft passing through the upper surface of the holder,
• wherein the substrate processing pad includes
• a pad body portion disposed inside the holder, and
• a pad protrusion portion having an upper portion connected to the pad body portion, protruded downward as much as a protruded length from a lower surface of the holder to the outside of the holder by passing through the lower surface of the holder, and
• the substrate processing sweeper has an upper portion connected to the lower surface of the holder so that it is to be adjacent to the pad protrusion portion, and is extended downward as much as an extended length smaller than the protruded length from the lower surface of the holder.

A substrate processing apparatus comprising:

• a processing container in which a processing space is formed;
• a support unit supporting and rotating a substrate in the processing space;
• and
• a brush unit including a substrate processing brush that processes the substrate supported by the support unit,
• wherein the substrate processing brush includes:
• a holder;
• a substrate processing pad detachably disposed in the holder, processing the substrate;
• and
• a substrate processing sweeper connected to the holder, processing the substrate together with the substrate processing pad,
• a first portion of the substrate processing pad is disposed inside the holder, and a second portion of the substrate processing pad is protruded to the outside of the holder by passing through one surface of the holder, and
• the substrate processing sweeper is connected to one surface of the holder so that it is to be adjacent to the second portion of the substrate processing pad protruded to the outside of the holder, and is extended from one surface of the holder.