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US 2026/0052938 A1Published application
Novel monitor function with robot arm and foup
OwnerChung Hsien LIAO, Jui-Mu CHO +4inventors
InventorsChung Hsien LIAO, Jui-Mu CHO, Bang-Yu HUANG, Chien-Fang LIN, Chia-Yu TANG, Chih-Kuo CHANG
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Abstract
A transport case is configured to hold a plurality of wafers for transport of the wafers. The transport case includes a sensor system configured to generate sensor data indicative of conditions within the transport case while the transport case is docked at a load/unload system of a semiconductor process tool. The transport case includes a communication system configured to transmit the sensor data from the sensor system to an external control system.
Claims20
A method, comprising:
- placing a transport case on a loading stage of a load/unload system of a semiconductor process tool;
- retrieving, with a robot arm, a wafer from the transport case while the transport case is on the loading stage;
- generating, with a sensor system of the transport case, sensor data while the transport case is on the loading stage;
- and
- transmitting the sensor data from the transport case to a control system.
2 more elements
A transport case, comprising:
- a slot configured to receive and hold a wafer;
- a sensor system including:
- a first sensor configured to generate first sensor data;
- and
- a second sensor configured to generate second sensor data;
- and
- a communication system configured to transmit the first and second sensor data to a control system remote from the transport case.
4 more elements
A system, comprising:
- a transport case including:
- a slot configured to hold a wafer;
- a sensor system configured to generate sensor data;
- and
- a communication system configured to transmit the sensor data;
- a semiconductor process tool including a load/unload system configured to receive the transport case and to unload the wafer from the transport case with a robot arm;
- and
- a control system configured to receive the sensor data and to control the load/unload system responsive to the sensor data.
5 more elements
Dependencies are inferred from the claim text.