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US 2026/0052784 A1Published application
Pixel implant geometries for high-performance photodetectors
AssigneeRaytheon Company
InventorsJamal I. Mustafa, Chad W. Fulk, David R. Rhiger
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Abstract
A system includes a focal planar array having multiple pixels. Each of at least some of the pixels includes a semiconductor substrate and a pixel formed in or over the semiconductor substrate, where the pixel includes a first implant having a first doping concentration and a second implant within the first implant. The second implant has a different width and/or depth than the first implant and a second doping concentration higher than the first doping concentration.
Claims20
An apparatus comprising:
- a semiconductor substrate;
- and
- a pixel formed in or over the semiconductor substrate, the pixel comprising:
- a first implant having a first doping concentration;
- and
- a second implant within the first implant, the second implant having a different width and/or depth than the first implant and a second doping concentration higher than the first doping concentration.
3 more elements
A system comprising:
- a focal planar array comprising multiple pixels, wherein each of at least some of the pixels comprises:
- a semiconductor substrate;
- and
- a pixel formed in or over the semiconductor substrate, the pixel comprising:
- a first implant having a first doping concentration;
- and
- a second implant within the first implant, the second implant having a different width and/or depth than the first implant and a second doping concentration higher than the first doping concentration.
4 more elements
A method of forming a pixel, the method comprising:
- obtaining a semiconductor substrate;
- performing a first implantation to form a first doped region of the substrate;
- and
- performing a second implantation to form a second doped region of the substrate;
- wherein the second doped region is positioned within the first doped region after formation of the doped regions;
- wherein the first doped region has a different width and/or depth than the second doped region;
- and
- wherein the second doped region has a higher doping concentration than the first doped region.
5 more elements
Dependencies are inferred from the claim text.