Semiconductor structure and method for forming same
AssigneeChangzhou Chemsemi Co., Ltd.
InventorsDaohua ZOU, Yuwei LIU, Yuxin LI
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AssigneeChangzhou Chemsemi Co., Ltd.
InventorsDaohua ZOU, Yuwei LIU, Yuxin LI
Estimating the term…
A semiconductor structure and a method for forming same. The semiconductor structure comprises: a substrate, which comprises a first region; two or more capacitor structures, which are connected in parallel and are sequentially stacked on the first region in the direction perpendicular to the substrate, wherein a top edge region of at least one capacitor structure is provided with a protective layer, the protective layer being used for covering the top edge region of the capacitor structure, and thereby reducing the current which flows from a metal layer, which is located above the protective layer, to the edge region of the capacitor structure. By using the scheme, the capacity of a capacitor structure in a semiconductor structure can be increased without increasing the area of a device, and the reliability of the capacitor structure can be improved.
A semiconductor structure, comprising:
A method for forming a semiconductor structure, comprising:
Dependencies are inferred from the claim text.