Integrated beam steering device with intensity modulator

An integrated beam steering device comprising:

• a substrate;
• a core layer provided on the substrate;
• a clad layer on the core layer;
• a plurality of upper electrodes provided on the clad layer;
• and
• a lower electrode provided on a lower surface of the substrate,
• wherein the substrate includes:
• a source region configured to generate laser beam;
• a distribution region spaced apart from the source region, and configured to transmit the laser beam;
• an amplification region provided between the source region and the distribution region, and configured to amplify the laser beam;
• a phase modulation region provided between the amplification region and the distribution region, and configured to modulate the phase of the laser beam;
• and
• a first intensity modulation region provided between the amplification region and the source region, and configured to modulate the intensity of the laser beam.