Systems, Methods, And Devices For Gas Pressure Profile Control
AssigneeEuv Tech, Inc.
InventorSeth Cousin
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AssigneeEuv Tech, Inc.
InventorSeth Cousin
Estimating the term…
Systems, methods, and devices disclosed herein provide gas pressure profile control for optical output generation. Systems include a light source configured to generate laser light, and a gas pressure profile controller. The gas pressure profile controller includes a first housing portion, a second housing portion coupled to the first housing portion, wherein the first housing portion and the second housing portion include an internal chamber, wherein the internal chamber includes an interaction region. The gas pressure profile controller includes a first optical path configured to receive the laser light, and a second optical path configured to transmit an optical output generated, at least in part, based on an interaction between the laser light and a gas, the second optical path being further configured to constrict a flow of gas from the interaction region. Systems include a gas source configured to provide a gas to the gas pressure profile controller.
A system comprising:
A device comprising:
A method comprising:
Dependencies are inferred from the claim text.