Multi-axis microscanner system, and method and apparatus for controlling the drive thereof

Abstract

A method for controlling a drive for a multi-axis, in particular two-axis, micro-scanner system. As part of the method, a drive device for the micro-scanner system is controlled in such a way that the micro-scanner system is thereby caused to perform a first rotational oscillation of a deflection element of the micro-scanner system about a first oscillation axis by means of excitation at a first drive frequency and, simultaneously with the first oscillation, a second rotational oscillation of a deflection element of the micro-scanner system about a second oscillation axis which is not parallel to the first oscillation axis, in particular orthogonal thereto, by means of excitation at a second drive frequency, wherein these drive frequencies are respectively varied in time. The drive frequencies are varied over time in such a way that a change in the frequency ratio between the two drive frequencies is counteracted at the same time. While the drive frequencies themselves change, a change in the frequency ratio is counteracted.

Dependencies are inferred from the claim text.