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US 2026/0050152 A1Published application
Optical device
AssigneeHitachi High-Tech Corporation
InventorTakashi ANAZAWA
Life of this patent
Estimating the term…
Abstract
An optical device in which a two-dimensionally distributed sample, a single condensing lens, a dichroic-mirror array in which plural dichroic mirrors are arrayed, and an image sensor are lined up in this order along an optical axis of the condensing lens, a direction in which plural dichroic mirrors are arrayed is perpendicular to the optical axis, an image of a measurement region on the sample is split into plural images having different wavelength components by the dichroic-mirror array and measured by the image sensor, and the dichroic-mirror array is closer to the image sensor than the condensing lens.
Claims18
-25. (canceled)
An optical device, wherein
- a two-dimensionally distributed sample, a single condensing lens, a dichroic-mirror array in which plural dichroic mirrors are arrayed, and an image sensor are lined up in this order along an optical axis of the condensing lens,
- a direction in which the plural dichroic mirrors are arrayed is perpendicular to the optical axis,
- a light emitted from a measurement region on the sample and collected by the condensing lens is incident on the dichroic-mirror array, and the incident light is split into plural light beams having different wavelength components by the dichroic mirror array,
- plural split images of the measurement region having different wavelength components are formed on and measured by the image sensor, and
- an entrance of the dichroic-mirror array where the light first enter the dichroic-mirror array is closer to the image sensor than the condensing lens.
2 more elements
An optical device, wherein, in a right-handed XYZ-orthogonal-coordinate system,
- a sample two-dimensionally distributed in parallel with the YZ-plane, a single condensing lens having an optical axis aligned with the X-axis, a dichroic-mirror array in which m dichroic mirrors are arrayed in parallel with each other in the Y-axis direction with m being an integer greater than or equal to 2, and an image sensor parallel with the YZ-plane are disposed along the X-axis positive direction in the above order,
- a light emitted from a measurement region on the sample and collected by the condensing lens is incident on the dichroic mirror array, and the incident light is split into m light beams having different wavelength components by the dichroic mirror array,
- m split images of the measurement region having different wavelength components are formed on and measured by the image sensor,
- an aperture of the dichroic-mirror array where the light first enter the dichroic-mirror array provided in an iris is located adjacent to a side of the dichroic-mirror array facing the condensing lens on the X-axis, and
- when a distance between the condensing lens and the image sensor in the X-axis direction is denoted by h, and a distance between the condensing lens and the aperture in the X-axis direction is denoted by x,
- [
- Mathematical
-
- formula
-
- 1
- ]
- 0.5
- <
- x
- h
- <
- 1
- is satisfied.
16 more elements
An optical device, wherein, in a right-handed XYZ-orthogonal-coordinate system,
- a sample two-dimensionally distributed in parallel with the YZ-plane, a single condensing lens having an optical axis aligned with the X-axis,
- a dichroic-mirror array in which m dichroic mirrors DA1, DA2, . . . , DAm are arrayed in parallel with each other in order from a negative direction to a positive direction of the Y-axis direction with m being an integer greater than or equal to 2, and n dichroic mirrors DB1, DB2, . . . , DBn are arrayed in parallel with each other in order from the positive direction to the negative direction of the Y-axis direction with n being an integer greater than or equal to 2,
- an image sensor parallel with the YZ-plane
- the sample, the dichroic-mirror array, and the image sensor are lined up along the X-axis positive direction in the above order,
- a light emitted from a measurement region on the sample and collected by the condensing lens is incident on the dichroic mirror array, and the incident light is split into (m+n−1) light beams having different wavelength components by the dichroic mirror array,
- (m+n−1) split images of the measurement region having different wavelength components are formed on and measured by the image sensor,
- an aperture of the dichroic-mirror array where the light first enter the dichroic-mirror array provided in an iris is located adjacent to a side of the dichroic-mirror array facing the condensing lens on the X-axis, and
- when a distance between the condensing lens and the image sensor in the X-axis direction is denoted by h, and a distance between the condensing lens and the aperture in the X-axis direction is denoted by x,
- [
- Mathematical
-
- formula
-
- 1
- ]
- 0.5
- <
- x
- h
- <
- 1
- is satisfied.
19 more elements
Dependencies are inferred from the claim text.