Back to results
US 2026/0050123 A1Published application
Mach-zehnder interferometers with phase delay arms having a metamaterial region
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
Estimating the term…
Abstract
Structures for a Mach-Zehnder interferometer and methods of forming a structure for a Mach-Zehnder interferometer. The structure comprises a first waveguide core including a first phase delay arm, and a second waveguide core including a second phase delay arm. The first phase delay arm includes a first taper, a second taper, and a plurality of segments between the first and second tapers.
Claims20
A photonic structure comprising:
- a waveguide core including a first taper, a second taper, and a first plurality of segments between the first taper and the second taper.
A structure for a Mach-Zehnder interferometer, the structure comprising:
- a first waveguide core including a first phase delay arm, the first phase delay arm including a first taper, a second taper, and a first plurality of segments between the first taper and the second taper;
- and
- a second waveguide core including a second phase delay arm.
A method of forming a structure for a Mach-Zehnder interferometer, the method comprising:
- forming a first waveguide core including a first phase delay arm, wherein the first phase delay arm includes a first taper, a second taper, and a plurality of segments between the first taper and the second taper;
- and
- forming a second waveguide core including a second phase delay arm.
Dependencies are inferred from the claim text.