Probe cards and methods related thereto
OwnerBelgacem Haba, Gaius Gillman Fountain, Jr. +2inventors
InventorsBelgacem Haba, Gaius Gillman Fountain, Jr., Cyprian Emeka Uzoh, Thomas Workman
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Abstract
Embodiments herein provide for probe cards and methods related thereto. A probe card comprises a probe and a substrate. The probe comprises a probe stand, a probe beam, and a probe tip. The probe tip and probe stand extend in a first direction, and the probe beam extends in a second direction different than the first direction. The substrate comprises a conductive feature disposed in a material layer. The probe stand of the probe is directly bonded to the conductive feature of the substrate via direct metal bonds.
Claims23
A probe card comprising:
- a probe comprising:
- a probe tip extending in a first direction;
- a probe beam extending in a second direction different than the first direction;
- and
- a probe stand extending in the first direction;
- and
- a substrate comprising a conductive feature disposed in a material layer, wherein the probe stand is directly bonded to the conductive feature of the substrate via direct metal bonds.
15-18. (canceled)
22-24. (canceled)
A method of fabricating a probe card comprising:
- providing one or more probes, each probe comprising a probe stand extending in a first direction, a probe beam extending in a second direction different than the first direction, and a probe tip extending in the first direction;
- providing a probe card substrate comprising one or more conductive features disposed in a material layer;
- and
- directly bonding each probe stand to a respective conductive feature.
28-51. (canceled)
Dependencies are inferred from the claim text.