Acousto-optical micro-electromechanical systems (mems) accelerometer

Abstract

The application is directed to a MEMS acousto-optic accelerometer for the detection and measurement of acceleration. The accelerometer is fabricated of optical quality materials using MEMS processing techniques on a substrate. It is comprised of a Bragg cell, proof mass, hinge, light source, and an optical detector. The proof mass of the accelerometer is attached to the substrate by a hinge that allows for pendulous motion under applied acceleration. The Bragg cell is anchored to the proof mass and to the substrate in such a way as to oppose the pendulous motion. The light source is coupled to the Bragg cell whose output is sensed by the optical detector. Force created by the proof mass and acceleration causes a change in the vibrational frequency of the Bragg cell resulting in a change in the frequency of the light sensed by the optical detector, which provides observability of the applied acceleration.

Dependencies are inferred from the claim text.