US 2026/0049965 A1Published application

Surface wave sensor device

OwnerHendrik Kähler, Silvan Schmid +1inventors

InventorsHendrik Kähler, Silvan Schmid, Holger Arthaber

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Abstract

The invention relates to a sensor device which has a carrier material, in particular a piezoelectric carrier material. Furthermore, the sensor device comprises at least one interdigital transducer, which is configured as a transmitter (IDTs) and as a receiver (IDTe) and is arranged on the carrier material, or at least one interdigital transducer, which is configured as a transmitter (IDTs) and at least one interdigital transducer, which is configured as a receiver (IDTe) and is also arranged on the carrier material. The sensor device further comprises at least one mechanical resonator (MR), which is arranged on the carrier material at a distance A from the IDTs and at a distance B from the IDTe, wherein the sensor device is set up so that a surface wave emitted by the IDTs as a transmit signal causes the MR to vibrate mechanically and a surface wave emitted by the vibrating MR travels as a receive signal in the direction of the IDTe and triggers a measurement signal in the latter.

Claims15

Dependent claims

A sensor device for measuring surface acoustic waves, comprising a carrier material, in particular a piezoelectric carrier material,

with at least a first interdigital transducer (IDT) arrangement or a second IDT arrangement,
wherein the first IDT arrangement comprises at least one interdigital transducer, which is configured as an IDT transmitter (IDTs) and as an IDT receiver (IDTe) and which is arranged on the carrier material,
and wherein the second IDT arrangement comprises at least one interdigital transducer, which is configured as an IDT transmitter, and at least one interdigital transducer, which is configured as an IDT receiver, and which are arranged on the carrier material,
wherein the sensor device comprises at least one mechanical resonator (MR), which is arranged on the carrier material at a distance A from the IDTs and at a distance B from the IDTe,
wherein the sensor device is configured so that an acoustic surface wave emitted by the IDTs causes the MR to vibrate mechanically as a transmit signal and a surface wave emitted by the vibrating MR travels in the direction of the IDTe as a receive signal and generates a measurement signal in the latter.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 19/101,831Filed 7 Aug 2023
Priority: AT A50602/20228 Aug 2022
Published: 19 Feb 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

G01N 29/022
Analysing fluids: fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks,…
G01N 29/12
Analysing solids: by measuring frequency or resonance of acoustic waves
G01N 29/036
Analysing fluids: by measuring frequency or resonance of acoustic waves
G01N 29/041
Analysing solids: on the surface of the material, e.g. using Lamb, Rayleigh or shear waves