Optical test apparatus and optical test method
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi OHNO, Hiroya KANO, Hideaki OKANO
Life of this patent
Estimating the term…
Abstract
According to one embodiment, an optical test apparatus includes a first aperture, a second aperture, an image sensor, and a first lens. The first aperture includes a first aperture plane provided with a first wavelength selecting region. The second aperture includes a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region. The image sensor is configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane. The first lens is configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane.
Claims14
1-16. (canceled)
An optical test apparatus comprising:
- a first aperture having a first wavelength selecting region, the first wavelength selecting region including a first region configured to allow a first light beam to pass through and a second region configured to allow a second light beam to pass through, the first light beam and the second light beam being light beams scattered by a test object, the first light beam travelling parallel to an optical axis and belonging to a first visible light range, the second light beam traveling non-parallel to the optical axis and belonging to a second visible light range;
- and
- an image sensor configured to image the first light beam that has passed through the first region and the second light beam that has passed through the second region.
Dependencies are inferred from the claim text.