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US 2026/0048461 A1Published application
Gas pressure driving device, positioning device, processing device, and device manufacturing method
AssigneeSumitomo Heavy Industries, Ltd.
InventorsTatsuya YOSHIDA, Naoto MUROI
Life of this patent
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Abstract
A gas pressure driving device includes a first driving shaft that drives a driven body in a first direction by a pressure of a gas, and a second driving shaft that drives the driven body in a second direction intersecting with first direction by the pressure of the gas. The first driving shaft drives the driven body in the first direction by the gas supplied through an inside of the first driving shaft and the second driving shaft.
Claims18
A gas pressure driving device comprising:
- a first driving shaft that drives a driven body in a first direction by a pressure of a gas;
- and
- a second driving shaft that drives the driven body in a second direction intersecting with first direction by the pressure of the gas,
- wherein the first driving shaft drives the driven body in the first direction by the gas supplied through an inside of the first driving shaft and the second driving shaft.
1 more element
Dependencies are inferred from the claim text.