Substrate transfer apparatus and substrate processing system including the same

A substrate processing apparatus comprising:

• a transfer chamber;
• and
• a transfer apparatus disposed within the transfer chamber to transfer a substrate,
• wherein the transfer apparatus includes:
• a robot main body having hands supporting a substrate;
• a vertical driving unit for moving the robot main body in a vertical direction;
• and
• a horizontal driving unit provided at a bottom end of the transfer chamber to move the vertical driving unit in a horizontal direction, and
• the horizontal driving unit includes:
• a horizontal case having an inner space;
• a first actuator provided horizontally within the horizontal case and connected to the vertical driving unit;
• a first cable veyor that is provided on one side of the first actuator to guide the cable connected to the vertical driving unit;
• a first exhaust fan for exhausting atmosphere of the inner space;
• and
• a first intake manifold for receiving suction force of the first exhaust fan through a first intake path connected to the first exhaust fan to intake a space where the first cable veyor is located.

A substrate transfer apparatus disposed in a transfer chamber, the substrate transfer apparatus comprising:

• a robot main body having hands supporting a substrate;
• and
• a driving unit for moving the robot main body in a straight direction,
• wherein the driving unit includes:
• a driving case having an inner space;
• a linear motion guide provided in the driving case, connected to the robot body, and having a shielding function;
• a cable veyor provided on one side of the linear motion guide to guide a cable connected to the robot main body;
• an exhaust fan for exhausting atmosphere of the inner space;
• and
• an intake manifold for receiving suction force of the exhaust fan through a first intake path connected to the exhaust fan to intake a space where the cable veyor is located;
• a second intake path connecting the exhaust fan to the linear motion guide to exhaust internal atmosphere of the linear motion guide;
• and
• a regulator that is provided on the second intake path and regulates suction force provided to an inside of the linear motion guide so that the inside of the linear motion guide maintains a certain pressure, and
• the linear motion guide includes:
• a case having an opening and an intake port connected to the second intake path;
• a slider mounted to be movable along the opening with respect to the case;
• and
• a seal plate for blocking the opening of the case and allowing the slider to move at the same time, and
• the intake manifold is provided side by side along a longitudinal direction of the cable veyor and has intake holes on one side facing the cable veyor, and
• the exhaust fan integrates and exhausts main exhaust airflow inside the driving case, first sub exhaust airflow of the first intake path connected to the intake manifold, and second sub exhaust airflow of the second intake path connected to the linear motion guide.