Detection device and method for manufacturing detection device
AssigneeJapan Display Inc.
InventorGenki ASOZU
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Abstract
According to an aspect, a detection device includes: a substrate; a plurality of photodiodes arranged in a matrix having a row-column configuration in a detection area of the substrate; and an element insulating film provided between the photodiodes. In each of the photodiodes, a lower electrode, an active layer, a first upper electrode, and a second upper electrode are stacked in the order as listed. The lower electrode, the active layer, and the first upper electrode are arranged so as to be separated for each of the photodiodes. The second upper electrode is continuously provided across the photodiodes so as to cover the first upper electrodes and the element insulating film.
Claims7
A detection device comprising:
- a substrate;
- a plurality of photodiodes arranged in a matrix having a row-column configuration in a detection area of the substrate;
- and
- an element insulating film provided between the photodiodes, wherein
- in each of the photodiodes, a lower electrode, an active layer, a first upper electrode, and a second upper electrode are stacked in the order as listed,
- the lower electrode, the active layer, and the first upper electrode are arranged so as to be separated for each of the photodiodes, and
- the second upper electrode is continuously provided across the photodiodes so as to cover the first upper electrodes and the element insulating film.
A method for manufacturing a detection device, the method comprising:
- stacking an active layer and a first upper electrode so as to cover a plurality of lower electrodes provided in a detection area of a substrate;
- patterning the first upper electrode so as to be separated for each of the lower electrodes, and then patterning the active layer so as to be separated for each of the lower electrodes using a plurality of the patterned first upper electrodes as masks;
- forming an element insulating film that covers at least side surfaces of the active layers and the first upper electrodes;
- and
- forming a second upper electrode so as to cover the first upper electrodes and the element insulating film.
Dependencies are inferred from the claim text.