Euv light source having a combination device
AssigneeTRUMPF Lasersystems for Semiconductor Manufacturing GmbH
InventorsBoris Regaard, Martin Lambert, Oliver Schlosser, Tolga Ergin
Life of this patent
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Abstract
An extreme ultraviolet (EUV) light source, including a first laser source for emitting a first laser beam, a second laser source for emitting a second laser beam, a combiner configured to combine the first laser beam and the second laser beam, and a beam-guide configured to jointly guide the first laser beam and the second laser beam into a target region for generating EUV radiation. The combiner is configured to supply the first laser beam and the second laser beam to the beam-guide for joint beam guidance via common optical units in a spatially separated manner and with a lateral offset.
Claims17
An extreme ultraviolet (EUV) light source, comprising:
- a first laser source for emitting a first laser beam;
- a second laser source for emitting a second laser beam;
- a combiner configured to combine the first laser beam and the second laser beam;
- and
- a beam-guide configured to jointly guide the first laser beam and the second laser beam into a target region for generating EUV radiation,
- wherein the combiner is configured to supply the first laser beam and the second laser beam to the beam-guide for joint beam guidance via common optical units in a spatially separated manner and with a lateral offset.
Dependencies are inferred from the claim text.