Line scanning temporally focused two-photon lithography system
AssigneeMassachusetts Institute of Technology
InventorsEdward Boyden, Daniel Oran, Peter T. So, Cheng Zheng
Life of this patent
Estimating the term…
Loading patent…
AssigneeMassachusetts Institute of Technology
InventorsEdward Boyden, Daniel Oran, Peter T. So, Cheng Zheng
Estimating the term…
The present invention presents improved systems and methods for performing multi-photon lithography. A line-scanning temporally focused two-photon lithography (LS-TFTPL) technique is capable of patterning three-dimensional structures with high throughput. An example LS-TFTPL system may include a pulsed laser, first optical components for expanding light pulses into an elongated or line cross section, a digital micromirror device for modulating the light pulses with a linear pattern and dispersing spectral components of the modulated light pulses, and second optical components for focusing the dispersed spectral components of the modulated light pulse at a line in or on a target material. The focused spectral components may alter the target material within selected voxels along the line, where the selected voxels spatially correspond to the linear pattern.
A method of multi-photon lithography, comprising:
2-5. (canceled)
A method of multi-photon lithography, comprising:
A system, comprising:
(canceled)
26-29. (canceled)
Dependencies are inferred from the claim text.