Mask inspection apparatus, vacuum seal component, and method for adjusting a mask inspection apparatus

Abstract

A mask inspection apparatus, a vacuum seal component and a method for adjusting a mask inspection apparatus. A mask inspection apparatus comprises a vacuum housing, an EUV camera mounted on the vacuum housing, and a projection lens, arranged in a vacuum chamber of the vacuum housing, for imaging at least one section of an EUV mask onto an image sensor of the EUV camera, wherein a vacuum seal component having a flexible wall portion is arranged between the vacuum housing and the EUV camera or a camera holder of this EUV camera, and wherein this flexible wall portion is arranged radially outside of a central axis of the EUV camera or of the camera holder.

Dependencies are inferred from the claim text.