LOW Tg MULTI-TETHER COPOLYMERIZED DIBLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY
AssigneeMerck Patent GmbH
InventorsDurairaj Baskaran, Md S. Rahman, Victor Monreal
Life of this patent
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AssigneeMerck Patent GmbH
InventorsDurairaj Baskaran, Md S. Rahman, Victor Monreal
Estimating the term…
Disclosed are two different block copolymer families having general structures (I) or (III), composition thereof, and the process of using these compositions for DSA; wherein B segment and B1 segment are polar block copolymer segments comprising either alkyl 2-methylenealkanoate derived repeating units, lactone derived repeat units, oxirane derived repeat units, oxetane or cyclic carbonate derived repeat units; L and L1 are either a direct valence bond or a linking moiety derived from a 1,1-diarylethene; A segment and A1 are non-polar block copolymer segment comprising styrenic repeat unit, E′, E″ E3 and E4 are different types of end groups, A2 is a block segment derived from an olefin or a diene having a Tg of about −5° C. to about −50° C., and in structure (I) is multi-tethered with oligo flexible tethered groups at various positions as outlined. E′-A-L-B-E″ (I) E3-A1-A2-L1-B1-E4 (III)
A block copolymer having structure (I), wherein
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A block copolymer having structure (III), wherein
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Dependencies are inferred from the claim text.