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US 2026/0042226 A1Published application
End effector and robot having an end effector
AssigneeCentrotherm International AG
InventorsPatrick PELZ, Ralf REIZE, Patrick SCHMID
Life of this patent
Estimating the term…
Abstract
An end effector is described which is suitable for handling both wafers and wafer cassettes. The end effector has a first gripping unit configured to pick up and hold individual wafers and a second gripping unit configured to pick up and hold a wafer cassette, wherein the first and second gripping units are connected to each other in such a way that they can be attached to a common robot arm and that they are arranged at an angle to each other so that they do not interfere with each other during operation.
Claims8
End effector comprising:
- a first gripping unit configured to pick up and hold individual wafers;
- a second gripping unit configured to pick up and hold a wafer cassette, wherein the first and second gripping units are connected to each other such that they are attachable to a common robot arm and that they are arranged at an angle to each other such that they do not interfere with each other in operation.
Dependencies are inferred from the claim text.