Nanosheet transistor devices and related fabrication methods
AssigneeSamsung Electronics Co., Ltd.
InventorsMing He, JaeHyun Park, Chihak Ahn, Mehdi Saremi, Rebecca Park, Harsono Simka, Daewon Ha
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorsMing He, JaeHyun Park, Chihak Ahn, Mehdi Saremi, Rebecca Park, Harsono Simka, Daewon Ha
Estimating the term…
Methods of forming transistor devices are provided. A method of forming a transistor device includes providing a nanosheet stack that includes a plurality of nanosheets on a substrate. A sacrificial layer is between the nanosheet stack and the substrate. The method includes removing the sacrificial layer to form an opening between the nanosheet stack and the substrate. The method includes forming a gate spacer and an isolation region by forming an insulating material on the nanosheet stack and in the opening, respectively. Related transistor devices are also provided.
A transistor device comprising:
A transistor device comprising:
A system, comprising:
Dependencies are inferred from the claim text.