US 2026/0040872 A1Published application

Substrate processing system

AssigneeTokyo Electron Limited

InventorsGenki OSADA, Toshiyuki MAKABE

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Abstract

A substrate processing system including a substrate processing apparatus, a transport apparatus, and a controller. The substrate processing apparatus includes a substrate processing chamber, a substrate support, and an edge ring having a first horizontal surface and a first inclined surface. The transport apparatus includes a transport chamber, a transport arm, an optical sensor, a lens structure, and an actuator that moves the lens structure in a horizontal direction between a first horizontal position and a second horizontal position. The controller determines a consumption amount of the first horizontal surface based on an output of the optical sensor when the lens structure is at the first horizontal position, and determines a consumption amount of the first inclined surface based on an output of the optical sensor when the lens structure is at the second horizontal position.

Claims20

Dependent claims

A substrate processing system comprising:

a substrate processing apparatus;
a transport apparatus;
and
controller circuitry, wherein
the substrate processing apparatus includes
a substrate processing chamber,
a substrate support disposed in the substrate processing chamber and having a substrate support surface and a ring support surface, and
an edge ring disposed on the ring support surface to surround a substrate on the substrate support surface and having a first horizontal surface and a first inclined surface,
the transport apparatus includes
a transport chamber,
a transport arm to transport the substrate between the transport chamber and the substrate processing chamber,
an optical sensor attached to the transport arm,
a lens structure disposed below the optical sensor and having a second horizontal surface and a second inclined surface, and
an actuator attached to the transport arm and to move the lens structure in a horizontal direction between a first horizontal position and a second horizontal position, in which the first horizontal position is a position at which the second horizontal surface overlaps an optical axis of the optical sensor and the second horizontal position is a position at which the second inclined surface overlaps the optical axis of the optical sensor, and
the controller circuitry is configured to determine a consumption amount of the first horizontal surface based on an output of the optical sensor when the lens structure is at the first horizontal position, and determine a consumption amount of the first inclined surface based on an output of the optical sensor when the lens structure is at the second horizontal position.

12 more elements

A substrate processing system comprising:

a substrate processing apparatus;
a transport apparatus;
and
controller circuitry, wherein
the substrate processing apparatus includes
a substrate processing chamber, and
a consumable component constituting a part of the substrate processing chamber or disposed in the substrate processing chamber, and having a first horizontal surface and a first inclined surface,
the transport apparatus includes
a transport chamber,
a transport arm to transport a substrate between the transport chamber and the substrate processing chamber,
an optical sensor attached to the transport arm,
a lens structure disposed above or below the optical sensor and having a second horizontal surface and a second inclined surface, and
an actuator attached to the transport arm and to move the lens structure in a horizontal direction between a first horizontal position and a second horizontal position, in which the first horizontal position is a position at which the second horizontal surface overlaps an optical axis of the optical sensor and the second horizontal position is a position at which the second inclined surface overlaps the optical axis of the optical sensor, and
the controller circuitry is configured to determine a state of the consumable component based on an output of the optical sensor.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application: 19/357,173Filed 14 Oct 2025
Priority: JP 2023-07019921 Apr 2023
Published: 5 Feb 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

H10P 72/0606
Apparatus for monitoring, sorting, marking, testing or measuring: position monitoring, e.g. misposition detection or presence detection
H10P 72/0431
Apparatus for manufacture or treatment: apparatus for thermal treatment
H10P 72/30
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof: for conveying, e.g. between different workstations
H10P 72/3302
Into and out of processing chamber: mechanical parts of transfer devices