Peeling device for display device and method for display device

A peeling method for a display device, the peeling method comprising:

• preparing a peeling device for a display device, wherein the peeling device comprises a transport unit, a carrier movable on and along the transport unit and having a substrate tray accommodated therein, a rotatable peeling stage disposed on the transport unit, a support disposed on the peeling stage and movable on the peeling stage along an upstream direction of the transport unit, a downstream direction of the transport unit, a downward direction toward the peeling stage, and an upward direction opposite to the downward direction, and rotatable in a first rotation direction, and a second rotation direction opposite to the first rotation direction, a gripper connected to the support so as to be disposed between the support and the peeling stage, and a static eliminator disposed on a side of the peeling stage;
• placing the carrier, in which the substrate tray and a substrate on an electrostatic chuck of the substrate tray are accommodated, on the transport unit;
• rotating the peeling stage with respect to a first side of the peeling stage facing the carrier in the first rotation direction so that a second side of the peeling stage opposite to the first side is lifted in the upward direction;
• inserting the gripper into a second hole of the substrate tray among a first hole of the substrate tray in the upstream direction and the second hole of the substrate tray in the downstream direction;
• overlapping the gripper and a lower surface of the substrate by moving the gripper inserted into the second hole in the upstream direction within the second hole;
• opening a first clamp and a second clamp of the substrate tray to release a constraining force of the first clamp and the second clamp applied to a first side of the substrate and a second side of the substrate;
• lifting the first side of the substrate from the electrostatic chuck through the gripper by moving the gripper out of the second hole by raising the support;
• and
• providing ions between the electrostatic chuck and the substrate through a nozzle of the static eliminator, which is disposed at an edge of the peeling stage in the upstream direction.

An electronic device comprising:

• a display device, and
• wherein a peeling device for the display device comprises:
• a transport unit;
• a carrier movable on and along the transport unit and having a substrate tray accommodated therein;
• a rotatable peeling stage disposed on the transport unit;
• a support disposed on the peeling stage and movable on the peeling stage along an upstream direction of the transport unit, a downstream direction of the transport unit, a downward direction toward the peeling stage, and an upward direction opposite to the downward direction, and rotatable in a first rotation direction, and a second rotation direction opposite to the first rotation direction;
• a gripper connected to the support so as to be disposed between the support and the peeling stage;
• and
• a static eliminator disposed on a side of the peeling stage.