Stacked transistor with 2d material channels
AssigneeInternational Business Machines Corporation
InventorsDarsith Jayachandran, Ruilong Xie, Chen Zhang, HUIMEI ZHOU, Shay Reboh, Oleg Gluschenkov
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AssigneeInternational Business Machines Corporation
InventorsDarsith Jayachandran, Ruilong Xie, Chen Zhang, HUIMEI ZHOU, Shay Reboh, Oleg Gluschenkov
Estimating the term…
A semiconductor integrated circuit (IC) device includes a bottom source/drain region and a top source/drain region stacked above the bottom source/drain region. The semiconductor IC device further includes a bottom channel that is composed of a first two dimensional (2D) material and is connected to the bottom source/drain region. The semiconductor IC device further includes a top channel that is composed of a second 2D material that is different than the first 2D material and that is connected to the top source/drain region. In examples, the semiconductor IC device further includes a bottom channel interfacial region between the bottom source/drain region and the one or more gates and/or a top channel interfacial region between the top source/drain region and the one or more gates.
A semiconductor integrated circuit (IC) device comprising:
A semiconductor integrated circuit (IC) device comprising:
A semiconductor integrated circuit (IC) device comprising:
Dependencies are inferred from the claim text.