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US 2026/0039276 A1Published application
Multilayer piezoelectric substrate device with reduced radiation loss
AssigneeSkyworks Solutions, Inc.
InventorRei Goto
Life of this patent
Estimating the term…
Abstract
A surface acoustic wave resonator with an interdigital transducer structure having an outer gap between each busbar and the interdigitated region of the interdigitated electrode fingers. An overcoat extends over the outer gap without extending into the interdigitated region. The overcoat is formed from a material that is different than that of the pair of opposing busbars and interdigitated electrode fingers.
Claims20
A surface acoustic wave resonator comprising:
- a piezoelectric layer;
- and
- an interdigital transducer structure over the piezoelectric layer, the interdigital transducer structure including a pair of opposing busbars having interdigitated electrode fingers extending therebetween to form an interdigitated region, the interdigital transducer structure having an outer gap formed between each busbar and the interdigitated region and an overcoat extending over the outer gap without extending into the interdigitated region, the overcoat formed from a material that is different than that of the pair of opposing busbars and the interdigitated electrode fingers.
A surface acoustic wave filter package comprising:
- a package;
- and
- an integrated circuit die enclosed in the package and including a surface acoustic wave resonator, the surface acoustic wave resonator including piezoelectric layer and an interdigital transducer structure over the piezoelectric layer, the interdigital transducer structure including a pair of opposing busbars having interdigitated electrode fingers extending therebetween to form an interdigitated region, the interdigital transducer structure having an outer gap formed between each busbar and the interdigitated region and an overcoat extending over the outer gap without extending into the interdigitated region, the overcoat formed from a material that is different than that of the pair of opposing busbars and interdigitated electrode fingers.
A mobile device comprising:
- an antenna;
- a transceiver;
- and
- a filter including a surface acoustic wave resonator, the surface acoustic wave resonator including a piezoelectric layer and an interdigital transducer structure over the piezoelectric layer, the interdigital transducer structure including a pair of opposing busbars having interdigitated electrode fingers extending therebetween to form an interdigitated region, the interdigital transducer structure having an outer gap formed between each busbar and the interdigitated region and an overcoat extending over the outer gap without extending into the interdigitated region, the overcoat formed from a material that is different than that of the pair of opposing busbars and interdigitated electrode fingers.
1 more element
Dependencies are inferred from the claim text.