Preparation method of multi-layer stacked waveguide

Abstract

The present invention relates to a preparation method of multi-layer stacked waveguide. The method involves a preliminary step: providing an optical waveguide block, wherein the optical waveguide block has a substrate and a plurality of optical waveguides, the optical waveguides are disposed within the substrate and adjacent to an upper surface of the substrate; and a bonding step: flipping over another optical waveguide block and bonding it above the optical waveguide block to form a double-layer stacked waveguide structure. In this way, a multi-layer waveguide stack structure can be formed by directly stacking optical waveguide blocks directly provided with a plurality of optical waveguides. Multi-layer stacking only needs to be completed by heating, thinning and/or depositing a silicon oxide layer, saving manufacturing time and cost.

Dependencies are inferred from the claim text.