Spectral Enhanced Surface Acoustic Wave Sensing Using Phononic And Photonic Interference
AssigneeBoard of Trustees of Michigan State University
InventorsJohannes POLLANEN, Pranaya Kishore RATH
Life of this patent
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Abstract
A SAW sensor includes a substrate comprising a first side and a second side and a ground plane disposed on the first side. The ground plane has a first portion separated from a second portion by a gap. An interdigitated transducer is disposed on the first side within the gap. A reflective acoustic such as a Bragg mirror is disposed adjacent to the interdigitated transducer within the gap to produce phononic Fano interference. A transmission line is disposed within the gap. The interdigitated transducer is coupled to the transmission line and to the first portion of the ground plane to produce photonic Fano interference.
Claims20
A sensor comprising:
- a substrate comprising a first side and a second side;
- a ground plane disposed on the first side, said ground plane comprising a first portion separated from a second portion by a gap;
- an interdigitated transducer disposed on the first side within the gap;
- a reflective mirror structure disposed adjacent to the interdigitated transducer within the gap to produce phononic Fano interference;
- a transmission line disposed within the gap;
- and
- said interdigitated transducer is coupled to the transmission line and to the first portion of the ground plane to generate photonic Fano interference.
A sensor comprising:
- a planar piezoelectric substrate comprising a first side and a second side;
- a ground plane disposed on the first side, said ground plane comprising a first portion separated from a second portion by a gap;
- an interdigitated transducer disposed on the first side within the gap, said interdigitated transducer comprises a first set of fingers interdigitated with a second set of fingers;
- a first set of Bragg mirrors and a second set of Bragg mirrors disposed on opposite sides of the interdigitated transducer within the gap;
- a transmission line disposed within the gap;
- said interdigitated transducer coupled to the transmission line and to the first portion of the ground plane to generate photonic interference;
- and
- the interdigitated transducer comprises two sets of interdigitated fingers a number of which is selected with a number of mirrors Bragg mirrors in the first set and second set to control the phononic interference.
A method comprising:
- generating surface acoustic wave signals at a surface acoustic wave sensor from an electromagnetic communicated though a transmission line to produce phononic Fano interference at the surface acoustic wave sensor, said surface acoustic wave sensor comprising an interdigitated transducer disposed on a substrate and a reflective structure disposed adjacent to the interdigitated transducer within a gap between two ground planes on the substrate, said sensor having a resonant mode;
- based on generating and the resonant mode, generating an acoustic signal;
- transducing the acoustic signal to form a second electromagnetic signal to generate a photonic Fano effect on an output signal of the transmission line based on the second electromagnetic signal interfering with a background electromagnetic leakage signal;
- generating the output signal based on the photonic Fano interference and the phononic Fano interference;
- and
- controlling a controlled device based on the output signal.
Dependencies are inferred from the claim text.