A system for synchronously detecting thickness and double-side surface profiles, comprising:
- a light source system, a deflection reflection system, a camera acquisition system, and a processing system, wherein
- the light source system is configured to provide an optical signal;
- the deflection reflection system comprises a decomposition unit and an integration unit, wherein the decomposition unit is configured to decompose the optical signal into two beams of sub-optical signals which are obliquely projected on an upper surface and a lower surface of an object to be measured respectively, and the integration unit is configured to integrate the sub-optical signals which are respectively reflected on the upper surface and the lower surface of the object to be measured into one beam of composite optical signal and output the composite optical signal to the camera acquisition system;
- the camera acquisition system is configured to acquire the composite optical signal outputted by the integration unit and generate image data;
- the processing system is configured to analyze the image data to obtain thickness and surface profile data of the object to be measured;
- the decomposition unit comprises:
- a first plane mirror, a first beam splitter prism, a first reflecting mirror, and a second reflecting mirror, wherein
- the optical signal emitted by the light source system is reflected to the first beam splitter prism through the first plane mirror, and the first beam splitter prism decomposes the optical signal into two beams of sub-optical signals, wherein one beam of sub-optical signal is reflected on the upper surface of the object to be measured through the first reflecting mirror, and the other beam of sub-optical signal is reflected on the lower surface of the object to be measured through the second reflecting mirror;
- the integration unit comprises:
- a third reflecting mirror, a fourth reflecting mirror, a second beam splitter prism, and a second plane mirror, wherein
- the third reflecting mirror receives the sub-optical signal reflected on the upper surface of the object to be measured and reflects the sub-optical signal to the second beam splitter prism, the fourth reflecting mirror receives the sub-optical signal reflected on the lower surface of the object to be measured and reflects the sub-optical signal to the second beam splitter prism, the second beam splitter prism integrates the two beams of received sub-optical signals into one beam of composite optical signal and projects the composite optical signal to the second plane mirror, and the second plane mirror reflects the composite optical signal to the camera acquisition system;
- and
- the processing system comprises:
- a single-side reconstruction unit, a fusion unit, and a thickness detection unit, wherein
- the single-side reconstruction unit is configured to construct surface profile data of the upper surface and surface profile data of the lower surface of the object to be measured respectively based on the image data acquired by the camera acquisition system;
- the fusion unit is configured to unify and splice the surface profile data of the upper surface and the surface profile data of the lower surface of the object to be measured based on a transformation matrix between the upper surface and the lower surface to obtain complete surface profile data of the object to be measured;
- and
- the thickness detection unit is configured to obtain a thickness of the object to be measured according to the complete surface profile data.