Methods, systems, and devices for controlling crystal growth devices
AssigneeMeishan Boya Advanced Materials Co., Ltd.
InventorsYu WANG, Pei LEI
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Abstract
Disclosed herein are a method, a system, and a device for controlling a crystal growth device. The method includes: obtaining historical growth data of at least one crystal growth device, the historical growth data including historical growth control data and historical growth result data; and determining a control mode of a target crystal growth device based on the historical growth data and a target growth result, the control mode including at least one of a temperature control mode and a power control mode.
Claims25
A method for controlling a crystal growth device, comprising:
- obtaining historical growth data of at least one crystal growth device, wherein the historical growth data includes historical growth control data and historical growth result data;
- and
- determining a control mode of a target crystal growth device based on the historical growth data and a target growth result, wherein the control mode includes at least one of a temperature control mode or a power control mode.
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A system for controlling a crystal growth device, comprising:
- an obtaining module for obtaining historical growth data of at least one crystal growth device, wherein the historical growth data includes historical growth control data and historical growth result data;
- and
- a determination module for determining a control mode of a target crystal growth device based on the historical growth data and a target growth result, wherein the control mode includes at least one of a temperature control mode or a power control mode.
A device for controlling a crystal growth device, comprising a processor, wherein the processor is used to perform the method for controlling the crystal growth device, including:
- obtaining historical growth data of at least one crystal growth device, wherein the historical growth data includes historical growth control data and historical growth result data;
- and
- determining a control mode of a target crystal growth device based on the historical growth data and a target growth result, wherein the control mode includes at least one of a temperature control mode or a power control mode.
Dependencies are inferred from the claim text.