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US 2026/0035262 A1Published application
Methods for synthesizing and/or purifying molybdenum compounds and related compositions and related systems
AssigneeEntegris, Inc.
InventorsDavid M. Ermert, Bryan C. Hendrix
Life of this patent
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Abstract
Methods for synthesizing and/or purifying molybdenum compounds are provided. A method comprises obtaining a reagent; obtaining a metal trioxide compound; and contacting the reagent and the metal trioxide compound sufficient to form a reaction product comprising a molybdenum compound. Related compositions, related systems, and other related methods are provided, among other things.
Claims30
A method comprising:
- obtaining a reagent,
- wherein the reagent comprises at least one of:
- a first metal halide compound,
- a second metal halide compound,
- a third metal halide compound, or
- any combination thereof;
- obtaining a metal trioxide compound of the formula:
- where:
- M is W or Mo;
- and
- contacting the reagent and the metal trioxide compound sufficient to form a reaction product of the formula:
- where:
- M is W or Mo;
- and
- X is a halide.
12 more elements
A composition comprising:
- a compound of the formula:
- where:
- M is W or Mo;
- and
- X is a halide,
- wherein the compound has a purity of at least 99.99969% by weight as determined by inductively coupled plasma mass spectrometry (ICP-MS).
3 more elements
A system comprising:
- a vessel,
- wherein the vessel is configured for delivering a precursor vapor to a vapor deposition apparatus;
- wherein the vessel comprises a precursor comprising a compound of the formula:
- where:
- M is W or Mo;
- and
- X is a halide,
- wherein the precursor is contained in the vessel at a temperature and a pressure sufficient for the compound to have a density of 4 g/cm3 or less;
- wherein the compound has a purity of at least 99.99969% by weight as determined by inductively coupled plasma mass spectrometry (ICP-MS).
6 more elements
Dependencies are inferred from the claim text.