Synchronizing pin lifting devices

A pin lifting system, comprising:

• at least a first pin lifting device configured for moving and positioning a substrate to be processed in a process atmosphere region which is providable by a vacuum process chamber, wherein the first pin lifting device comprises a first pneumatic actuator with a first pneumatic cylinder and a first moving member movably arranged inside of the first pneumatic cylinder and which first moving member is configured to be connected with a lift pin and is movable along a first movement axis;
• a first control valve connected to the first pneumatic actuator and to a first fluid supply and configured to control at least one of pressurizing of the first pneumatic actuator or fluid flow out of or into the first pneumatic actuator to provide movement of the first moving member;
• a first fluid sensor arranged and configured to measure at least one of pressurization of the first pneumatic actuator or fluid flow out of or into the first pneumatic actuator;
• a controlling unit configured to control the first control valve by applying a first controlling signal and to receive a measurement signal of the first fluid sensor, characterized in that the controlling unit is configured to adjust a movement of the first moving member by:
• providing a reference moving information, the reference moving information representing at least a reference duration of moving a moving member of a pin lifting device from a starting position to an end position;
• providing moving the first moving member from a first starting position to a first end position by applying the first controlling signal to the first control valve;
• determining a first moving information regarding the movement of the first moving member from the first starting position to the first end position;
• comparing the first moving information and the reference moving information and deriving a first moving deviation;
• and
• adjusting the first controlling signal based on the first moving deviation.