Tuning of superconducting tunnel junction devices using microfabricated heaters

A device, comprising:

• a substrate;
• a plurality of quantum bits disposed on the substrate, each quantum bit comprising a Josephson junction;
• and
• a plurality of heater elements disposed on the substrate;
• wherein each heater element is disposed in proximity to a respective quantum bit of the plurality of quantum bits, and configured to generate heat through resistive heating in response to a current applied to the heater element, to heat a region of the substrate on which the Josephson junction of the respective quantum bit is disposed to thermally anneal the Josephson junction of the respective quantum bit.

A system, comprising:

• a prober apparatus;
• and
• a control system operatively coupled to the prober apparatus;
• wherein the control system is configured to control the prober apparatus to perform a tuning process to tune a transition frequency of at least one quantum bit of a quantum bit array on a quantum chip, wherein in performing the tuning process, the control system is configured to utilize the prober apparatus to:
• measure a resistance of a Josephson junction of the at least one quantum bit;
• apply a controlled current to an on-chip heater element, which is disposed in proximity to the Josephson junction of the at least one quantum bit, to cause the on-chip heater element to generate heat through resistive heating and thereby heat a region of the quantum chip on which the Josephson junction is disposed to shift a resistance of the Josephson junction from the measured resistance to a target resistance.