Flexible acoustic sensor systems and fabrication thereof

A method for fabrication of a flexible acoustic sensing apparatus, the method comprising:

• forming a stack of materials on a glass wafer, the stack of materials comprising:
• a thin-film transistor (TFT) device having a flexible substrate;
• a piezoelectric layer on the TFT device, the piezoelectric layer configured to, responsive to receipt of an acoustic signal, provide an electrical signal to one or more receiver elements having associated circuitry on the TFT device;
• and
• an electrode layer on the piezoelectric layer, the electrode layer comprising one or more acoustic transmitter elements configured to transmit one or more acoustic signals;
• performing a laser liftoff (LLO) process to separate the stack of materials from the glass wafer;
• subsequent to the LLO process, cutting the stack of materials on the glass wafer into at least one chip having at least a portion of the stack of materials, the at least one chip having one or more dimensions that are smaller than the glass wafer;
• and
• implementing the at least one chip having at least the portion of the stack of materials with a display component.

A method for fabrication of a flexible acoustic sensing apparatus, the method comprising:

• obtaining a stack of materials on a glass wafer, the stack of materials comprising:
• a thin-film transistor (TFT) component having a flexible substrate;
• a piezoelectric component on the TFT component, the piezoelectric component configured to, responsive to receipt of an acoustic signal, provide an electrical signal to one or more receiver elements having associated circuitry on the TFT component;
• and
• an electrode component on the piezoelectric component, the electrode component comprising one or more acoustic transmitter elements configured to transmit one or more acoustic signals;
• performing a laser liftoff (LLO) process to separate the stack of materials from the glass wafer;
• and
• implementing at least a portion of the stack of materials with a display component.