Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

A method comprising:

• receiving a selection of manufacturing equipment associated with a current fabrication process of a manufacturing environment;
• identifying, from a plurality of eco-efficiency models, a respective eco-efficiency model corresponding to at least one of the selected manufacturing equipment, wherein each of the plurality of eco-efficiency models represents a prior environmental resource consumption of a prior fabrication process involving a respective manufacturing equipment component;
• determining, based on the identified respective eco-efficiency model, values for one or more process parameters for the current fabrication process that will reduce environmental resource consumption of the current fabrication process when run using the selected manufacturing equipment;
• and
• applying the determined values for the one or more process parameters to the current fabrication process.

A non-transitory computer readable medium comprising instructions that, when executed by a set of one or more processing devices, cause the set of one or more processing devices to:

• receive a selection of manufacturing equipment associated with a current fabrication process of a manufacturing environment;
• identify, from a plurality of eco-efficiency models, a respective eco-efficiency model corresponding to at least one of the selected manufacturing equipment, wherein each of the plurality of eco-efficiency models represents a prior environmental resource consumption of a prior fabrication process involving a respective manufacturing equipment component;
• determine, based on the identified respective eco-efficiency model, values for one or more process parameters for the current fabrication process that will reduce environmental resource consumption of the current fabrication process when run using the selected manufacturing equipment;
• and
• apply the determined values for the one or more process parameters to the current fabrication process.