# US 2026/0029720 A1 · Liquid supply unit and substrate processing apparatus including the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2026/0029720 A1 - Document ID: US20260029720A1 - Status: Published application - Kind: A1 - Application number: 19/273,872 - Filed: 2025-07-18 - Published: 2026-01-29 - Earliest claimed: 2024-07-24 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Gu Won SEON; Gyeong Won SONG; Dae Sung KIM - Web page: https://patentgrep.com/patent/US20260029720A1 ## CPC - G03F 7/16: Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Disclosed is an apparatus for processing a substrate, the apparatus including: a processing unit for processing a substrate; and a liquid supply unit for supplying a liquid to the substrate disposed in the processing unit. The liquid supply unit includes: a storage assembly in which a liquid is stored; and a liquid supply pipe for supplying the liquid in the storage assembly to the processing unit, and the storage assembly includes: a container having an interior space; a pack unit that is placed in an interior space and includes an inner pack in which a liquid is stored; a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe; and a pressurizing unit that is located outside the pack unit in the accommodation space and physically pressurizes the pack unit. ## Claims ### Claim 1 An apparatus for processing a substrate, the apparatus comprising: a liquid treating chamber for processing a substrate; and a liquid supply unit for supplying a liquid to the substrate disposed in the liquid treating chamber, wherein the liquid supply unit includes: a storage assembly in which a liquid is stored; and a liquid supply pipe for supplying the liquid in the storage assembly to the liquid treating chamber, and the storage assembly includes: a container having an interior space; a pack unit that is placed in the interior space and includes an inner pack in which a liquid is stored; a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe; and a pressurizing unit that is located outside the pack unit in the interior space and physically pressurizes the pack unit. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the pack unit further includes an outer pack having an accommodation space for accommodating the inner pack, and the liquid supply unit further includes a gas supply unit for supplying gas into the accommodation space to an outer space of the inner pack. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the pressurizing unit includes: a pressurizing member; and a first driver for moving the pressurizing member between a standby position spaced apart from the pack unit and a pressurizing position for pressurizing the pack unit. ### Claim 4 (depends on 3) The apparatus of claim 3, wherein the pressurizing member is provided in a roller shape, and the pressurizing unit further includes a second driver for rotating the pressurizing member about a central axis thereof. ### Claim 5 (depends on 3) The apparatus of claim 3, wherein the pressurizing member includes a first pressurizing member and a second pressurizing member positioned to face each other with the pack unit interposed therebetween. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the container includes: a body having the interior space and having an open top; and a cover for opening and closing the open upper portion of the body, and the pack unit is provided to the container to be detachable from the container. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the liquid supply unit further includes: a trap tank installed in the liquid supply pipe; and a pump installed in the liquid supply pipe, the liquid supply unit includes the plurality of storage assemblies, and the plurality of storage assemblies is provided so that a storage assembly selected from among the plurality of storage assemblies supplies a liquid to the trap tank. ### Claim 8 (depends on 2) The apparatus of claim 2, wherein the liquid supply unit further includes a detector that directly or indirectly detects a state of the liquid amount stored in the inner pack. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the detector is an optical sensor installed in the liquid supply pipe. ### Claim 10 (depends on 8) The apparatus of claim 8, wherein the liquid supply unit further includes a controller that receives a signal detected from the detector, and controls the gas supply unit and the pressurizing unit. ### Claim 11 (depends on 10) The apparatus of claim 10, wherein the controller controls the gas supply unit and the pressurizing unit so that when the amount of the liquid remaining in the inner pack is greater than a set amount, the inner pack is pressurized by gas supplied from the gas supply unit, and the liquid in the inner pack is supplied to the liquid supply pipe, and when the amount of the liquid remaining in the inner pack is less than the set amount, the pack unit is pressurized by the pressurizing unit, so that the liquid in the inner pack is supplied to the liquid supply pipe. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein the inner pack is made of an acid-resistant material. ### Claim 13 (depends on 2) The apparatus of claim 2, wherein the outer pack is coated to block light. ### Claim 14 A liquid supply unit comprising: a storage assembly in which a liquid is stored; and a liquid supply pipe for supplying the liquid in the storage assembly to the outside, wherein the storage assembly includes: a container having an interior space; a pack unit that is placed in the interior space and includes an inner pack in which a liquid is stored; a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe; and a pressurizing unit positioned outside the pack unit in the interior space and physically pressurizes the pack unit. ### Claim 15 (depends on 14) The liquid supply unit of claim 14, wherein the pack unit further includes an outer pack having an accommodation space for accommodating the inner pack, and the liquid supply unit further includes a gas supply unit for supplying gas into the accommodation space to an outer space of the inner pack. ### Claim 16 (depends on 13) The liquid supply unit of claim 13, wherein the pressurizing unit includes: a pressurizing member including a first pressurizing member and a second pressurizing member positioned to face each other with the pack unit interposed therebetween; and a first driver for moving the pressurizing member between a standby position spaced apart from the pack unit and a pressurizing position for pressurizing the pack unit. ### Claim 17 (depends on 16) The liquid supply unit of claim 16, wherein the first pressurizing member and the second pressurizing member are provided in a roller shape, and the pressurizing unit further includes a second driver for rotating the first pressurizing member and the second pressurizing member with respect to a central axis thereof. ### Claim 18 (depends on 13) The liquid supply unit of claim 13, further comprising: a detector for directly or indirectly detecting a state of a liquid amount stored in the inner pack; and a controller for receiving a signal detected from the detector, and controlling the gas supply unit and the pressurizing unit, wherein the controller controls the gas supply unit and the pressurizing unit so that when the amount of the liquid remaining in the inner pack is greater than a set amount, the inner pack is pressurized by gas supplied from the gas supply unit, and the liquid in the inner pack is supplied to the liquid supply pipe, and when the amount of the liquid remaining in the inner pack is less than the set amount, the pack unit is pressurized by the pressurizing unit, so that the liquid in the inner pack is supplied to the liquid supply pipe. ### Claim 19 An apparatus for processing a substrate, the apparatus comprising: a liquid treating chamber for processing a substrate; and a liquid supply unit for supplying a liquid to the substrate disposed in the liquid treating chamber, wherein the liquid supply unit includes: a storage assembly in which a liquid is stored; and a liquid supply pipe for supplying the liquid in the storage assembly to the liquid treating chamber, and the storage assembly includes: a container having an interior space; a pack unit including an inner pack for storing a liquid and an outer pack having an accommodation space for accommodating the inner pack; a gas supply unit for supplying gas into the accommodation space to an outer space of the inner pack; a liquid delivery pipe for supplying the liquid stored in the inner pack to the liquid supply pipe; and a pressurizing unit positioned outside the outer pack in the accommodation space and physically pressurizing the outer pack and the inner pack, and the pressurizing unit includes: a pressurizing member including a first pressurizing member and a second pressurizing member that are positioned to face each other with the pack unit interposed therebetween and have a roller shape; a first driver for moving the pressurizing member between a standby position spaced apart from the pack unit and a pressurizing position for pressurizing the pack unit; and a second driver for rotating the first pressurizing member and the second pressurizing member with respect to a central axis thereof. ### Claim 20 (depends on 19) The apparatus of claim 19, wherein the liquid supply unit further includes: a detector for directly or indirectly detecting a state of a liquid amount stored in the inner pack; and a controller for receiving a signal detected from the detector, and controlling the gas supply unit and the pressurizing unit, and the controller controls the gas supply unit and the pressurizing unit so that when the amount of the liquid remaining in the inner pack is greater than a set amount, the inner pack is pressurized by gas supplied from the gas supply unit, and the liquid in the inner pack is supplied to the liquid supply pipe, and when the amount of the liquid remaining in the inner pack is less than the set amount, the pack unit is pressurized by the pressurizing unit, so that the liquid in the inner pack is supplied to the liquid supply pipe.