Line narrowing module, narrowed-line laser apparatus, and method for manufacturing electronic devices
AssigneeGigaphoton Inc.
InventorsToshihiro KOBAYASHI, Osamu WAKABAYASHI, Daisuke TEI
Life of this patent
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Abstract
A line narrowing module includes an enlarging optical system configured to enlarge and output laser light; and a grating configured to reflectively diffract the laser light output from the enlarging optical system, and the enlarging optical system includes a first quartz crystal prism so disposed that an optic axis thereof is perpendicular to a light incident plane of the laser light entering the first quartz crystal prism in such a way that the laser light approaches the grating, and a synthetic quartz prism disposed at a position closest to the grating.
Claims20
A line narrowing module comprising:
- an enlarging optical system configured to enlarge and output laser light;
- and
- a grating configured to reflectively diffract the laser light output from the enlarging optical system,
- the enlarging optical system including
- a first quartz crystal prism so disposed that an optic axis thereof is perpendicular to a light incident plane of the laser light entering the first quartz crystal prism in such a way that the laser light approaches the grating, and
- a synthetic quartz prism disposed at a position closest to the grating.
A narrowed-line laser apparatus comprising:
- a line narrowing module including an enlarging optical system configured to enlarge and output laser light, and a grating configured to reflectively diffract the laser light output from the enlarging optical system;
- an output coupling mirror;
- and
- a laser chamber disposed in an optical path of an optical resonator and including a pair of discharge electrodes, the optical resonator including the line narrowing module and the output coupling mirror,
- the enlarging optical system including
- a first quartz crystal prism so disposed that an optic axis thereof is perpendicular to a light incident plane of the laser light entering the first quartz crystal prism in such a way that the laser light approaches the grating, and
- a synthetic quartz prism disposed at a position closest to the grating.
A method for manufacturing electronic devices, the method comprising:
- generating laser light by using a narrowed-line laser apparatus;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture the electronic devices,
- the narrowed-line laser apparatus including
- a line narrowing module including an enlarging optical system configured to enlarge and output the laser light, and a grating configured to reflectively diffract the laser light output from the enlarging optical system,
- an output coupling mirror, and
- a laser chamber disposed in an optical path of an optical resonator and including a pair of discharge electrodes, the optical resonator including the line narrowing module and the output coupling mirror,
- the enlarging optical system including
- a first quartz crystal prism so disposed that an optic axis thereof is perpendicular to a light incident plane of the laser light entering the first quartz crystal prism in such a way that the laser light approaches the grating, and
- a synthetic quartz prism disposed at a position closest to the grating.
Dependencies are inferred from the claim text.