Photonic chip structure and semiconductor package including the same

A photonic chip structure comprising:

• an electronic integrated circuit chip;
• a connection terminal connected to the electronic integrated circuit chip;
• an optical integrated circuit chip under the electronic integrated circuit chip and the connection terminal in a vertical direction and comprising a through electrode and an interlayer insulating layer on at least a portion of the through electrode, the through electrode connected to the connection terminal;
• an optical block spaced apart from the electronic integrated circuit chip in a horizontal direction and configured to provide a path for optical signals to the optical integrated circuit chip;
• and
• an adhesive layer directly contacting the optical block and the interlayer insulating layer.

A semiconductor package comprising:

• a package substrate;
• an interposer above the package substrate;
• a memory chip structure above the interposer;
• a non-memory chip structure above the interposer and spaced apart from the memory chip structure in a horizontal direction;
• and
• a photonic chip structure spaced apart from the non-memory chip structure in the horizontal direction with the non-memory chip structure therebetween,
• wherein the photonic chip structure comprises:
• an electronic integrated circuit chip;
• a connection terminal connected to the electronic integrated circuit chip;
• an optical integrated circuit chip under the electronic integrated circuit chip and the connection terminal in a vertical direction and comprising a photonic integrated circuit (PIC) connection pad and a PIC insulating layer on the PIC connection pad, the PIC connection pad electrically connected to the connection terminal;
• and
• an optical block spaced apart from the electronic integrated circuit chip in the horizontal direction and configured to provide a path for optical signals to the optical integrated circuit chip, and
• wherein the PIC insulating layer includes a cavity, and the optical block is in the cavity.