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US 2026/0029296 A1Published application
Gas detection device, gas supply system, and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsShinobu KAWAMORITA, Nobuo NAGATA
Life of this patent
Estimating the term…
Abstract
A gas detection device for detecting a processing gas leaking into a gas box includes: a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of an exhaust duct that evacuates an interior of the gas box; and a gas detector configured to detect the processing gas sucked by the suctioner.
Claims10
A gas detection device for detecting a processing gas leaking into a gas box, comprising:
- a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of an exhaust duct that evacuates an interior of the gas box;
- and
- a gas detector configured to detect the processing gas sucked by the suctioner.
A gas supply system comprising:
- a gas supply line configured to supply a processing gas into a processing container;
- a fluid control device provided in the gas supply line;
- a gas box configured to accommodate the fluid control device;
- an exhaust duct configured to evacuate an interior of the gas box;
- and
- a gas detection device configured to detect the processing gas leaking into the gas box,
- wherein the gas detection device includes:
- a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of the exhaust duct;
- and
- a gas detector configured to detect the processing gas sucked by the suctioner.
7 more elements
A substrate processing apparatus comprising:
- a processing container configured to accommodate a substrate;
- a gas supply line configured to supply a processing gas into the processing container;
- a fluid control device provided in the gas supply line;
- a gas box configured to accommodate the fluid control device;
- an exhaust duct configured to evacuate an interior of the gas box;
- and
- a gas detection device configured to detect the processing gas leaking into the gas box,
- wherein the gas detection device includes:
- a suctioner having a plurality of suction holes for sucking the processing gas at different positions in a cross section perpendicular to a central axis of the exhaust duct;
- and
- a gas detector configured to detect the processing gas sucked by the suctioner.
8 more elements
Dependencies are inferred from the claim text.