Pressure transducer and preparation method thereof, and detection device

Abstract

A pressure transducer and a preparation method thereof, and a detection device are disclosed, which relate to the technical field of pressure transducers. The pressure transducer includes: a first substrate; a second substrate including a pressure sensitive film, a sealed pressure reference chamber being provided between the pressure sensitive film and the first substrate, the pressure sensitive film being capable to be deformed in a direction towards or away from the first substrate, and the second substrate being a glass substrate; a first polar plate, a part or all area of the first polar plate is arranged on the pressure sensitive film; and a second polar plate arranged on a side of the first substrate facing the pressure sensitive film, and a part or all area of the second polar plate being directly opposite to the first polar plate to form a capacitor with the first polar plate.

Dependencies are inferred from the claim text.