POLYCRYSTALLINE SiC FORMED BODY AND METHOD FOR MANUFACTURING THE SAME

Abstract

The present invention provides a polycrystalline SiC formed body excellent in flatness, and a method for manufacturing the same; it is a substantially plate-shaped polycrystalline SiC formed body comprising a first main surface and a parallel second main surface, the polycrystalline SiC formed body including, along a normal direction to the first main surface, a region R200, a region R311, a region R111, and a region R220 in which a (200) plane, a (311) plane, a (111) plane, and a (220) plane are oriented, respectively; and along a normal direction to the second main surface, a region R200, a region R311, a region R111, and a region R220 in which a (200) plane, a (311) plane, a (111) plane, and a (220) plane are oriented, respectively, wherein an area fraction of region RXYZ=area of region RXYZ/(area of region R111+area of region R200+area of region R220+area of region R311) and region RXYZ is any one of region R111, region R200, region R220, and region R311, wherein at least one of a difference between an area fraction of region R200 in the first main surface and an area fraction of region R200 in the second main surface being 10.0% or less and a difference between an area fraction of region R311 in the first main surface and an area fraction of region R311 in the second main surface being 10.0% or less is satisfied.

Dependencies are inferred from the claim text.