Susceptor

A method of manufacturing a susceptor used for making a wafer product, wherein:

• the susceptor comprises a plate-shaped graphite base material, in which the graphite base material itself can be heated by the induction heating coil;
• and a ceramic coating layer coated on the flat plate-shaped graphite base material, the plate-shaped graphite base material having a coefficient of thermal expansion of 3.5×10−6/K or higher and 4.5×10−6/K or lower and an electrical resistivity (ρ0) of 8.0 μΩ·m or higher and 13.0 μΩ·m or lower and exhibiting a variation (ρmax/ρmin) in the horizontal direction in-plane electrical resistivity distribution at room temperature of 1.00 or higher and 1.05 or lower and a rate of high-temperature change (ρ1600/ρ800) Of electrical resistivity at 1600° C. to that at 800° C. measured in the same direction of 1.14 or higher and 1.30 or lower;
• the method of making the susceptor comprising:
• preparing an aggregate raw material of a mixture of two or more members selected from the group consisting of an amorphous coke powder, an acicular coke powder and a graphite powder, the mixture of aggregate raw material is constituted by 30 to 80 parts by weight of the amorphous coke powder and 20 to 70 parts by weight of the acicular coke powder, or constituted by 50 to 80 parts by weight of the amorphous coke powder and 20 to 50 parts by weight of the graphite powder,
• kneading the aggregate raw material with a binder, molding, baking, and graphitizing at temperature of 2800° C. or more in a high frequency induction furnace, thereby producing the graphite base material,
• and coating a ceramic layer on the graphite base material.