Replica mold manufacturing method and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKEN KATSUTA, TOSHIKI ITO
Life of this patent
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Abstract
A method of manufacturing a replica mold includes filling a curable composition into a space between a replica blank and a pattern region of a master mold; curing the curable composition to form a replica pattern portion with a pattern of the pattern region transferred thereto; and separating the replica pattern portion and the master mold from each other. The master mold includes a pattern peripheral region surrounding the pattern region, and there is a step between the pattern region and the pattern peripheral region, and an area of the replica pattern portion at a bonding interface between the replica blank and the replica pattern portion is larger than an area of the pattern region.
Claims18
A method of manufacturing a replica mold, the method comprising:
- filling a curable composition into a space between a replica blank and a pattern region of a master mold;
- curing the curable composition to form a replica pattern portion with a pattern of the pattern region transferred thereto;
- and
- separating the replica pattern portion and the master mold from each other,
- wherein
- the master mold includes a pattern peripheral region surrounding the pattern region, and there is a step between the pattern region and the pattern peripheral region, and
- an area of the replica pattern portion at a bonding interface between the replica blank and the replica pattern portion is larger than an area of the pattern region.
An article manufacturing method comprising:
- manufacturing a replica mold, including:
- filling a curable composition into a space between a replica blank and a pattern region of a master mold;
- curing the curable composition to form a replica pattern portion with a pattern of the pattern region transferred thereto;
- and
- separating the replica pattern portion and the master mold from each other,
- wherein the master mold includes a pattern peripheral region surrounding the pattern region, and there is a step between the pattern region and the pattern peripheral region, and an area of the replica pattern portion at a bonding interface between the replica blank and the replica pattern portion is larger than an area of the pattern region;
- forming, on a substrate, a pattern formed of a cured product of a curable composition by using the replica mold;
- and
- obtaining an article by processing the substrate with the pattern formed thereon.
Dependencies are inferred from the claim text.