Piezoelectric thin film device and manufacturing method for same
AssigneeDenso Corporation
InventorsNobuaki KUZUYA, Youichi ASHIDA
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Abstract
The present disclosure is provided with a substrate, a lower electrode stacked on the substrate, a piezoelectric film stacked on the lower electrode and composed of a piezoelectric body, and an upper electrode stacked on the piezoelectric film. A thin film portion is formed of the lower electrode, the piezoelectric film, and the upper electrode due to a recess formed in the substrate opposite the lower electrode. An impurity layer is formed in a surface layer of the piezoelectric film to contain a second element different from the first element, when an element constituting the piezoelectric body is the first element.
Claims11
A piezoelectric thin film device comprising:
- a substrate;
- a lower electrode stacked on the substrate;
- a piezoelectric film made of a piezoelectric body and stacked on the lower electrode;
- and
- an upper electrode stacked on the piezoelectric film, wherein
- a recess is formed in the substrate opposite to the lower electrode such that a thin film portion is formed to include the lower electrode, the piezoelectric film, and the upper electrode,
- an element forming the piezoelectric body is a first element, and
- an impurity layer is formed in the piezoelectric film to contain, in addition to the first element, a second element different from the first element.
A manufacturing method of a piezoelectric thin film device comprising:
- forming a lower electrode on an upper surface of a substrate;
- forming a piezoelectric film made of a piezoelectric body on an upper surface of the lower electrode;
- forming an upper electrode on an upper surface of the piezoelectric film;
- forming a recess in the substrate opposite to the lower electrode to form a thin film portion including the lower electrode, the piezoelectric film, and the upper electrode;
- and
- forming an impurity layer in the piezoelectric film to contain a first element and a second element that is different from the first element, wherein the piezoelectric body is formed of the first element.
Dependencies are inferred from the claim text.