Method and laser system for generating secondary radiation

A laser system for generating secondary radiation, the laser system comprising:

• a laser device configured to provide a pulse sequence of laser pulses, wherein:
• the pulse sequence has a pulse train of at least two pre-pulses and a main pulse following the pulse train,
• a total energy of the pre-pulses of the pulse train is between 0.2 mJ and 10 mJ, and a temporal pulse interval between successive pre-pulses of the pulse train is between 50 ps and 500 ns,
• a pulse energy of the main pulse is between 2 mJ and 50 mJ, and a pulse duration of the main pulse is between 15 fs and 300 fs, and
• a temporal pulse interval between the pulse train and the main pulse is between 1 ns and 1 μs,
• wherein the laser system is configured to apply the pulse sequence of laser pulses to a target material in a target region, wherein secondary radiation is generated by interaction of the target material with the pulse sequence.