Probe, and shape measuring device

A probe, comprising:

• a light incidence/emission portion configured to emit measuring light and receive reflected light of the measuring light;
• an optical splitting element including a first surface, a second surface, and a third surface, the optical splitting element configured to:
• split the measuring light incident on the first surface from the light incidence/emission portion and emit a portion of the measuring light from the second surface;
• receive, on the second surface, the reflected light of the measuring light that has been emitted from the second surface;
• and
• split the reflected light received on the second surface, emit a portion of the reflected light from the first surface toward the light incidence/emission portion, and emit a remaining portion of the reflected light from the third surface;
• a light-receiving element configured to receive the reflected light emitted from the third surface;
• and
• a tip portion mounting portion having an optical path for the measuring light emitted from the second surface and the reflected light incident on the second surface, and configured to selectively mount a first probe tip portion for non-contact measurement and a second probe tip portion for contact measurement, wherein
• the first probe tip portion includes
• a hollow first shaft that includes a first tip portion and a first base end portion, and forms the optical path in a case where the first base end portion is removably mounted to the tip portion mounting portion, and
• an optical element provided in the first tip portion and configured to:
• emit the measuring light, which is incident from the second surface through an inside of the first shaft toward an object to be measured;
• and emit the reflected light, which is reflected by the object to be measured, toward the second surface, and
• the second probe tip portion includes
• a hollow second shaft that includes a second tip portion and a second base end portion, and forms the optical path in a case where the second base end portion is removably mounted to the tip portion mounting portion,
• a tip sphere provided in the second tip portion and configured to contact the object to be measured, and
• a retroreflective element configured to retroreflect the measuring light incident from the second surface through an inside of the second shaft and return the reflected light toward the second surface.