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US 2026/0022693 A1Published application
Pump, chemical supply unit, and substrate treatment apparatus
AssigneeSemes Co., Ltd.
InventorsFumihiko IKEDA, Dae Sung KIM, Hae Kyung KIM
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Abstract
The present disclosure provides a pump, a chemical supply unit, and a substrate treatment apparatus. A pump according to an embodiment of the present disclosure includes: a case having a pressure space formed therein; a pressurizing member connected to the pressure space by a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.
Claims20
A pump, comprising:
- a case having a pressure space formed therein;
- a pressurizing member connected to the pressure space by a pressurizing line;
- and
- a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.
1 more element
A chemical supply unit, comprising:
- a storage tank in which a chemical is stored;
- a supply pipe extending from the storage tank to a nozzle unit;
- a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes,
- wherein the pump includes:
- a case having a pressure space formed therein;
- a pressurizing member connected to the pressure space through a pressurizing line;
- and
- a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.
5 more elements
A substrate treatment apparatus, comprising:
- a process chamber;
- a treatment container installed in the process chamber and having a processing space for processing a substrate;
- a support unit supporting the substrate in the processing space;
- a nozzle unit discharging a chemical to the substrate supported by the support unit;
- a chemical supply unit supplying the chemical to the nozzle unit,
- wherein the chemical supply unit includes:
- a storage tank in which the chemical is stored;
- a supply pipe extending from the storage tank to the nozzle unit;
- and
- a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes,
- wherein the pump includes:
- a case having a pressure space formed therein;
- a pressurizing member connected to the pressure space through a pressurizing line;
- and
- a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.
12 more elements
Dependencies are inferred from the claim text.