Method for producing quartz member, device for coating quartz member, and method for regenerating quartz member
AssigneeMitsubishi Chemical Corporation
InventorsMasami MUNEHIRA, Guoyan XIE
Life of this patent
Estimating the term…
Abstract
A method for producing a quartz member, a quartz member coating device, and a method for regenerating a quartz member, which are capable of suppressing disturbance of a flame emitted from a burner when quartz coating is performed on a base material. The method for producing the quartz member includes a fire processing involving applying heat with a burner to a surface of a processing target member containing quartz. In the fire processing, an airflow control plate is installed within a range of ±45° with respect to a position parallel to an axis of the burner as a reference.
Claims17
A method for producing a quartz member, the method comprising fire processing by applying heat with a burner to a surface of a processing target member containing quartz, wherein, in the fire processing, an airflow control plate is installed within a range of ±45° with respect to a position parallel to an axis of the burner as a reference.
A quartz member coating device comprising a burner and an airflow control plate, wherein the airflow control plate is installed within a range of ±45° with respect to a position parallel to an axis of the burner as a reference.
Dependencies are inferred from the claim text.