Membrane transfer method

Abstract

A method for producing a device comprising a piezoelectric membrane adjacent at least one cavity includes providing a carrier substrate having surfaces defining the at least one cavity extending into the carrier substrate at a first face of the carrier substrate. A layer of piezoelectric material is deposited on a face of a donor substrate. The layer of piezoelectric material is bonded to the carrier substrate to join the donor substrate and the carrier substrate, and after the bonding, the donor substrate is split along a plane within the donor substrate so as to transfer a membrane comprising the layer of piezoelectric material to the carrier substrate adjacent the at least one cavity. A donor substrate for use in such a method includes a fragile plane therein delimiting a surface layer, and a layer of piezoelectric material having a thickness greater than 500 nm on the surface layer.

Dependencies are inferred from the claim text.