Semiconductor memory device and manufacturing method of the semiconductor memory device
AssigneeSK hynix Inc.
InventorKang Sik CHOI
Life of this patent
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Abstract
A semiconductor memory device, and a method of manufacturing the semiconductor memory device, includes: a substrate including a peripheral circuit, a gate stack structure disposed over the substrate and including a cell array region and a stepped region that extends from the cell array region, a channel structure passing through the cell array region of the gate stack structure, a memory layer surrounding a sidewall of the channel structure, a first contact plug passing through the stepped region of the gate stack structure, and an insulating structure surrounding a sidewall of the first contact plug to insulate the first contact plug from the gate stack structure.
Claims17
A semiconductor memory device, comprising:
- a first semiconductor pattern and a second semiconductor pattern over a lower structure;
- a lower contact plug disposed between the lower structure and the second semiconductor pattern;
- a gate stack structure disposed over the first and second semiconductor patterns and including a cell array region and a stepped region extending from the cell array region;
- a channel structure passing through the cell array region of the gate stack structure and extending into the first semiconductor pattern;
- a memory layer in contact with the channel structure;
- a first contact plug disposed in the stepped region of the gate stack structure;
- and
- an insulating structure surrounding a sidewall of the first contact plug to insulate the first contact plug from the gate stack structure,
- wherein the memory layer includes a first memory pattern surrounded by the first semiconductor pattern and a second memory pattern disposed between the channel structure and the gate stack structure, and
- wherein the first contact plug passes through the insulating structure and the second semiconductor pattern to contact the lower contact plug.
Dependencies are inferred from the claim text.